Synthesis of optimized compliant mechanisms for ultra-precision applications

Compliant mechanisms for ultra-precision applications are often required to achieve highest accuracy over largest possible ranges of motion along multiple axes. The typical synthesis approach for such high demands is based on the substitution of the revolute joints of a suitable rigid-body model with optimized flexure hinges. However, during the transition from rigid-body model to compliant mechanism, the effects of multiple input parameters are still widely unknown. Among them are the degrees of freedom of the rigid-body model, the integration of the drive elements, as well as the coupling of mechanisms to achieve multiple motion axes. The following contribution expands the fundamentals of the synthesis of compliant mechanisms based on rigid-body models for their application in ultra-precision technologies. Based on the investigation of the aforementioned parameters as well as the knowledge gained from previous research work, a novel synthesis method has been developed