Publication date
January 1977
DOIAbstract
PhDElectrical engineeringUniversity of Michigan, Horace H. Rackham School of Graduate Studieshttp://deepblue.lib.umich.edu/bitstream/2027.42/180865/2/7717957.pd
PhDElectrical engineeringUniversity of Michigan, Horace H. Rackham School of Graduate Studieshttp://deepblue.lib.umich.edu/bitstream/2027.42/180865/2/7717957.pd
The proposal describes a pressure sensor which has a diaphragm held by a support, said diaphragm com...
The pressure has a major impact when it comes to control of chemical processes. A method for integra...
Sensitive pressure sensor with nitride membrane and optoelectronic read-out system is described. Mea...
Ph.D.Electrical engineeringUniversity of Michigan, Horace H. Rackham School of Graduate Studieshttp:...
The demand for micromachined solid-state pressure sensors has been escalating in many fields. Resear...
A surface micromachined pressure sensor array has been designed and fabricated. The sensors are base...
Since the discovery of piezoresistivity in silicon in the mid 1950s, silicon-based pressure sensors ...
Diaphragm pressure sensors based on silicon micromachining have advantages of small size and integra...
Diaphragm pressure sensors based on silicon micromachining have advantages of small size and integra...
A surface micromachined pressure sensor array has been designed and fabricated. The sensors are base...
The sensors market is huge and growing annually, of this a large sector is pressure sensors. With in...
A method is presented for the accurate determination of the deflection of diaphragms commonly used f...
Tez (Yüksek Lisans) -- İstanbul Teknik Üniversitesi, Fen Bilimleri Enstitüsü, 1994Thesis (M.Sc.) -- ...
International audienceThis paper presents original designs of pressure sensor combining thin membran...
International audienceThis paper presents original designs of pressure sensor combining thin membran...
The proposal describes a pressure sensor which has a diaphragm held by a support, said diaphragm com...
The pressure has a major impact when it comes to control of chemical processes. A method for integra...
Sensitive pressure sensor with nitride membrane and optoelectronic read-out system is described. Mea...
Ph.D.Electrical engineeringUniversity of Michigan, Horace H. Rackham School of Graduate Studieshttp:...
The demand for micromachined solid-state pressure sensors has been escalating in many fields. Resear...
A surface micromachined pressure sensor array has been designed and fabricated. The sensors are base...
Since the discovery of piezoresistivity in silicon in the mid 1950s, silicon-based pressure sensors ...
Diaphragm pressure sensors based on silicon micromachining have advantages of small size and integra...
Diaphragm pressure sensors based on silicon micromachining have advantages of small size and integra...
A surface micromachined pressure sensor array has been designed and fabricated. The sensors are base...
The sensors market is huge and growing annually, of this a large sector is pressure sensors. With in...
A method is presented for the accurate determination of the deflection of diaphragms commonly used f...
Tez (Yüksek Lisans) -- İstanbul Teknik Üniversitesi, Fen Bilimleri Enstitüsü, 1994Thesis (M.Sc.) -- ...
International audienceThis paper presents original designs of pressure sensor combining thin membran...
International audienceThis paper presents original designs of pressure sensor combining thin membran...
The proposal describes a pressure sensor which has a diaphragm held by a support, said diaphragm com...
The pressure has a major impact when it comes to control of chemical processes. A method for integra...
Sensitive pressure sensor with nitride membrane and optoelectronic read-out system is described. Mea...
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