Precision tuning of InAs quantum dot emission wavelength by iterative laser annealing

Abstract Controlling the emission wavelength of quantum dots (QDs) over large surface area wafers is challenging to achieve directly through epitaxial growth methods. We have investigated an innovative post growth laser-based tuning procedure of the emission of self-assembled InAs QDs grown epitaxially on InP (001). A targeted blue shift of the emission is achieved with a series of iterative steps, with photoluminescence diagnostics employed between the steps to monitor the result of intermixing. We demonstrate tuning of the emission wavelength of ensembles of QDs to within approximately ±1 nm, while potentially better precision should be achievable for tuning the emission of individual QDs