Consideration of Deformation of TiN Thin Films with Preferred Orientation Prepared by Ion-beam-assisted Deposition

The plastic deformation of TiN thin films was considered by the hardness anisotropy of these films with the (111) and (200) preferred orientation. These hardness were measured by the nano-indentation technique as have already been reported. The plastic deformation of TiN films were caused by indentation of the trigonal diamond tip, and the evidence of this phenomenon was given by the cross-sectional SEM observation and the TED analysis. The influence of difference of residual stress and grain size on the hardness anisotropy was restrictive, and the hardness anisotropy can be explained by the anisotropy of the yield stress calculated by Schmid's law. This relationship suggests the existence of {100} <110> slip system of TiN crystal. The TEM observation of brittle cracks of TiN films also makes it clear that these cracks caused not by the cleavage fracture but by the intergranular fracture