Influence of hydrogen addition on electric and optical properties of sputter-deposited aluminum-doped zinc oxide thin films

We have investigated the influence of hydrogen addition on AZO thin films. The electric conductivity of the film was improved when a very small amount of hydrogen (0.25%) was added, but was decreased by adding excessive amount of hydrogen. The optical transmittance and the deposition rate were almost constant for a small amount of hydrogen addition of not more than 0.5%, but decreased by adding excessive amount of hydrogen.ナノダイナミクス国際シンポジウム 平成20年1月49日(木) 於長崎大学Nagasaki Symposium on Nano-Dynamics 2009 (NSND2009), January 27, 2025, Nagasaki University, Nagasaki, Japan, Poster Presentatio