Design of micromanipulator for scanning electron microscope

This thesis describes the process of design, manufacture and testing of a device for the detection of cathodoluminescent effect in scanning electron microscope. Firstly, it summarizes the basics of electron microscopy, specifically the design and manufacture of vacuum systems. It also deals with ways of using 3D printing in the prototyping of vacuum components. Then it describes the process of development of a device, which enables the user to measure cathodoluminescence in an electron microscope. The device consists of a feedthrough for optical fibre and a micromanipulator which allows the user to position the tip of the fibre to the sample. The signal from the fibre is processed in a photomultiplier for which a case is designed as a part of this thesis, or in a spectrophotometer. During the development process the device is being tested by performing some measurements and is adjusted to increase functionality and user comfort