Development Testing of a XYZ Scanner for Atomic Force Microscope

Atomic force microscopy (AFM) is a widely used tool in nano measurement and manipulation techniques. However, a traditional AFM system suffers from the limitation of slow scanning rate, due to the low dynamic performance of piezoelectric positioners. As an important part of AFM system, scanner will have a significant impact the result of the scanning imaging and operation. It is well know that high-speed operation of anAFM are increasingly required, and it is also a challenge for the researchers. In this paper, we proposed a parallel kinematic high-speed piezoelectric actuator (PZT) XYZ scanner. The design is aimed at achieving high resonance frequencies and low cross-coupling. The developed stage consists of a parallel kinematic XY stage and a Z stage. The Z stage is mounted on the central moving platform of the XY stage. To achieve the design objective, several parallel leaf flexure hinge mechanisms, arranging symmetrically around the central moving platform of the XY stage, are utilized to provide large stiffness and reduce cross-coupling. For the Z stage, a symmetrical leaf flexure parallelogram mechanism is adopted to achieve high resonance frequencies and decoupling. Then, finite element analysis (FEA) is utilized to validate the characteristics of the XYZ scanner. Finally, extensive experiments are conducted, demonstrating feasibility of the proposed scanner