Chemical Aspects of Electronic Ceramic Processing

This volume contains 65 papers from a symposium entitled "Chemical Aspects of Electronic Ceramics Processing," held over four days at the 1997 MRS Fall Meeting in Boston. The common themes in all of the research presented in this volume are the creative use of chemistry principles for ceramic fabrication and a multidisciplinary approach to materials research. Inorganic chemistry, solid-state chemistry, chemical engineering, materials science and engineering, and electrical engineering have all been skillfully combined to produce materials which will play an increasingly more important part in our lives. As in prior years, chemical vapor deposition (CVD) continues to be a popular area of research and was the subject of approximately half of the papers in this volume. Particularly "hot" areas of research are new and improved precursors, delivery systems for low-vapor pressure precursors, and improved processing and materials properties. Papers are evenly divided between oxide ceramics and non- oxide ceramics