Research, development and improvement of manufacturing technology of integrated transducers and sensors of energy parameters, including for control and regulation of parameters of technological processes of MEA production (Flexible manufacturing systems (FMS), Flexible manufacturing modules (FMP), etc.) 925.24.432-90.

The report presents the results of research and development on the design and manufacturing technology of integrated silicon transducers for mechanical systems. The set of technical solutions, supported by research and development, includes the following key points: The miniaturization limits have been achieved within the anisotropic chemical etching technology on standard substrates used in planar technology; The results on expanding the temperature range of sensors with p-n junctions have significantly surpassed expectations, exceeding by more than 50°C; A technical solution for reducing the pressure limit, which restricts the use of sensors with semiconductor elastic elements, has been investigated, and these solutions have been obtained for the small class of sensors weighing less than 40 g; The system of technological solutions for the development and production of mechanical sensors is complemented by a group of plasma profiling processes that are crucial for aligning crystal shapes with lathe-machined components. The conducted research allows for: Defining the scope of research and development aimed at creating various mechanical sensors, primarily including parametric series of pressure sensors for non-aggressive environments; Identifying the need for R&D in creating pressure resistance elements through hydraulic fluids for silicon elastic elements, investigating the long-term stability of sensor elements and connections; Providing mathematical support for calculating stresses in sensor housings under high pressures and vibrations; Exploring solutions to raise the upper limit of the working temperature range; Investigating methods for vacuum bonding of silicon with the metal casing to create absolute pressure sensors