Method For Determining The Resonant Frequency Of An Elastic Element Of A Semiconductor Integrated Transducer

The invention relates to vibration testing of semiconductor integrated transducers. The purpose of the invention is to improve the accuracy of determining the resonant frequency. The tests excite the self-oscillation of the elastic element of the transducer by applying a smoothly varying pressure flow of air to it. When the self-oscillation process is steady, the resonant frequency of the transducer is determined by the change in the output electrical signal of its sensing element. The specific property of self-oscillating systems is in a stable mode of oscillations with the frequency equal to the natural frequency of this system, which determines the achievement of the purpose of the invention. 1 ill