Measured data of article in J. Vac. Sci. Technol. A 39, 052401 (2021); doi: 10.1116/6.0001126

The folder contains raw and fitted data of the in 2021 published article: Wafer-level uniformity of atomic-layer-deposited niobium nitride thin films for quantum devices, Authors: Emanuel Knehr, Mario Ziegler, Sven Linzen, Konstantin Ilin, Patrick Schanz, Jonathan Plentz, Marco Diegel, Heidemarie Schmidt, Evgeni Il’ichev, and Michael Siegel, Journal: Journal of Vacuum Science & Technology A 39, 052401 (2021); https://doi.org/10.1116/6.0001126 The names of the 13 data files include the corresponding figure numbers of the published article