The length of the channel OFET based thin film is determined during preparation takes place using the technique of lithography and mask during the metal deposition process. The lithography technique is the basic process steps in the manufacture of semiconductor devices. Lithography is the process of moving geometric shapes mask pattern to a thin film of material that is sensitive to light. The pattern of geometric shapes on a mask has specifications, as follows: long-distance source and drain channels varied, i.e. 100 μm, the width of the source and drain are made permanent. Bottom contact OFET structure has been created using a combination of lithography and thin film deposition processes
The channel lengths of the top contact organic thin film transistors are usually defined during thei...
A method of creating micro patterned devices by patterning thin films which are deposited on a subst...
It is investigated the submicron fabrication feasibility of lithography technology. Two methods that...
A method for the manufacture of at least part of a thin-film device is described wherein, said metho...
A method for the manufacture of at least part of a thin-film device is described wherein, said metho...
This paper describes a strategy for the fabrication of functional electronic components (transistors...
Lithographic processes belong to the most critical steps in the fabrication of microelectronic circu...
EP 973188 A UPAB: 20000218 NOVELTY - Production process uses a mask (5) that can be displaced in at ...
interferometry, spatial heterodyne Optical lithography, also known as photolithography, uses light t...
This paper reports on a methodology to fabricate arbitrarily shaped structures using technologies co...
A method of creating micro patterned devices by patterning thin films which are deposited on a subst...
Thin film devices are conquering many aspects of today’s life, and continuous shrinking of building ...
Abstract. The paper introduce the photolithography technology. First, the writer explain the process...
The channel lengths of the top contact organic thin film transistors are usually defined during thei...
Because thin material films can possess a uniquecombination of properties their use in commercial as...
The channel lengths of the top contact organic thin film transistors are usually defined during thei...
A method of creating micro patterned devices by patterning thin films which are deposited on a subst...
It is investigated the submicron fabrication feasibility of lithography technology. Two methods that...
A method for the manufacture of at least part of a thin-film device is described wherein, said metho...
A method for the manufacture of at least part of a thin-film device is described wherein, said metho...
This paper describes a strategy for the fabrication of functional electronic components (transistors...
Lithographic processes belong to the most critical steps in the fabrication of microelectronic circu...
EP 973188 A UPAB: 20000218 NOVELTY - Production process uses a mask (5) that can be displaced in at ...
interferometry, spatial heterodyne Optical lithography, also known as photolithography, uses light t...
This paper reports on a methodology to fabricate arbitrarily shaped structures using technologies co...
A method of creating micro patterned devices by patterning thin films which are deposited on a subst...
Thin film devices are conquering many aspects of today’s life, and continuous shrinking of building ...
Abstract. The paper introduce the photolithography technology. First, the writer explain the process...
The channel lengths of the top contact organic thin film transistors are usually defined during thei...
Because thin material films can possess a uniquecombination of properties their use in commercial as...
The channel lengths of the top contact organic thin film transistors are usually defined during thei...
A method of creating micro patterned devices by patterning thin films which are deposited on a subst...
It is investigated the submicron fabrication feasibility of lithography technology. Two methods that...