Control of a MEMS Fast Steering Mirror With Improved Quasi-Static Performance

This paper presents a control algorithm for a micro-electro-mechanical system (MEMS) fast steering mirror (FSM), whose performance is poor in open loop control mode. Based on the characterization and parameter identification of MEMS FSM, an improved double step algorithm is proposed to shorten the settling time and improve its quasi-static working bandwidth. A characterization system is set up, in which an optical sensor is utilized to monitor the tilt angle of FSM. The performance of the FSM in the time and frequency domain are both acquired, while the critical parameters of the FSM model are identified. Finally, the closed-loop experiments for the FSM are done to verify the effectiveness of the control algorithm. The experimental results demonstrate that the settling time (98%) of the FSM is effectively reduced from 398 ms to 0.4 ms under the improved double step control mode, which has a better tracking performance and tiny overshoot, compared with the open loop control mode