A near-field scanning microwave microscope in a scanning electron microscope: design and challenges.

We present a Scanning Electron and Microwave Microscopy (SEMM) that is a combination of complementary microscopy techniques. The SEMM namely combines Atomic Force Microscopy (AFM), Scanning Electron Microscopy and Vector Network Analysis (VNA). Combination of multiple modes allows cross correlation of imaging techniques that may be useful for investigating materials at the nanoscale