The plasma generating parts of ion sources including their power supplies are usually floated to high potential (ion extraction voltage), thus requiring great insulation efforts and high costs for high-energy ion beams. A new concept for pulsed ion sources is presented in which a single power supply is used to simultaneously produce the plasma and high extractor voltage via a modified Marx generator. Proof-of-principle experiments have been performed with high-current spark discharges in vacuum where multiply charged ions are produced with this Marx-generator based ion source (Magis). Using Magis, it has been demonstrated that pulsed ion beams of very high energies can be obtained with relatively low voltage. For copper, ion of charge state...
For film synthesis by energetic condensation, it is necessary to produce plasmas with a high degree ...
The vacuum arc ion source has evolved over the past twenty years into a standard laboratory tool for...
An ion source is described in which a metal vapor vacuum arc is used to create the plasma from which...
The plasma generating parts of ion sources including their power supplies are usually floated to hig...
Ion energy of the beam formed by an ion source is proportional to extractor voltage and ion charge s...
A small, simple ion source for the production of high brightness beams of metal ions is described. A...
Intense beams of metal ions can be formed from a vacuum arc ion source. Broadbeam extraction is conv...
Vacuum arc ion sources provide a convenient tool for the production of intense beams of metal ions. ...
A pulsed magnetic field of up to 10 kG was incorporated into a vacuum arc ion source. The field was ...
We consider the charge state distribution of ions produced in the metal vapor vacuum arc plasma disc...
A miniature multiple beamlet approach to an injector system was recently proposed in order to reduc...
We have developed an ion source which can produce high current beams of metal ions. The source uses ...
An ion source is described in which a metal vapor vacuum arc is used to create the plasma from which...
Ion implantation energy can in principal be increased by increasing the charge states of the ions pr...
Multiply charged ion beam generation is an active field of research for a number of technological ap...
For film synthesis by energetic condensation, it is necessary to produce plasmas with a high degree ...
The vacuum arc ion source has evolved over the past twenty years into a standard laboratory tool for...
An ion source is described in which a metal vapor vacuum arc is used to create the plasma from which...
The plasma generating parts of ion sources including their power supplies are usually floated to hig...
Ion energy of the beam formed by an ion source is proportional to extractor voltage and ion charge s...
A small, simple ion source for the production of high brightness beams of metal ions is described. A...
Intense beams of metal ions can be formed from a vacuum arc ion source. Broadbeam extraction is conv...
Vacuum arc ion sources provide a convenient tool for the production of intense beams of metal ions. ...
A pulsed magnetic field of up to 10 kG was incorporated into a vacuum arc ion source. The field was ...
We consider the charge state distribution of ions produced in the metal vapor vacuum arc plasma disc...
A miniature multiple beamlet approach to an injector system was recently proposed in order to reduc...
We have developed an ion source which can produce high current beams of metal ions. The source uses ...
An ion source is described in which a metal vapor vacuum arc is used to create the plasma from which...
Ion implantation energy can in principal be increased by increasing the charge states of the ions pr...
Multiply charged ion beam generation is an active field of research for a number of technological ap...
For film synthesis by energetic condensation, it is necessary to produce plasmas with a high degree ...
The vacuum arc ion source has evolved over the past twenty years into a standard laboratory tool for...
An ion source is described in which a metal vapor vacuum arc is used to create the plasma from which...