Data acquisition with a nuclear microprobe

Spatially resolved information from the near surfaces of materials can be obtained with a nuclear microprobe. The spatial resolution is determined by the optics of the instrument and radiation damage in the specimen. Two— and three—dimensional maps of elemental concentration may be obtained from the near surfaces of materials. Data are acquired by repeated scans of a constantly moving beam over the region of interest or by counting for a preset integrated charge at each specimen location. Copyright © 1981 by The Institute of Electrical and Electronics Engineers. Inc