Conscientious and sustained handling of energy and material resources at semiconductor reliability testing by applying a combination of optimal DOEs and reliable lifetime modeling

The problem of contemporary semiconductor reliability testing is twofold: on one hand demands on the device lifetime increase steadily implying longer testing times and on the other hand resources are limited (devices, testing time, ...). Therefore it seems unavoidable to apply advanced statistical methods to gain a reliable lifetime model. To increase the model quality significantly, we propose a combination of optimal Design of Experiments (DoE) and Bayesian statistical modeling. Optimal DoE ensures that the data for the model contain as much information as possible, whereas Bayesian modeling provides the possibility to include available prior information. With this approach resources can be saved because lifetime testing can be reduced to a necessary minimum