Over the last decades, the complexity of high-Tech systems, and the software systems controlling them, has increased considerably. In practice, it is hard to keep knowledge and documentation of these ever-evolving software systems up-To-date with their actual realization; we are dealing with legacy software. Clearly, this lack of knowledge, insight, and understanding is more and more becoming a critical issue. Process mining provides an interesting opportunity to improve understanding and analyze software behavior based on observations from the system on the run. However, a concrete software process analysis methodology was lacking. This paper 1) discusses a software process analysis case study at ASML, a large high-Tech company, and, based...