Integrated spectrometer and displacement sensor based on mechanically tunable photonic crystals
- Zobenica, Z.
- Van Der Heijden, R.W.
- Petruzzella, M.
- Pagliano, F.
- Xia, T.
- Midolo, L.
- Cotrufo, M.
- Cho, Y. J.
- Van Otten, F.W.M.
- Fiore, A.
Publication date
September 2017
DOI Publisher
Institute of Electrical EngineersAbstract
We present a nano-opto-electro-mechanical sensor based on electrostatically tunable double-membrane photonic crystal cavities. We demonstrate free-space and waveguide coupling schemes for the input light, while the readout is provided by an integrated quantum dot photodiode.</p
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