Robust active vibration isolation: a multivariable data-driven approach

Active vibration isolation is essential for a large range of high precision motion systems in industry. This paper aims to develop a framework for high performance robust vibration isolation by explicitly addressing multivariable flexible dynamical behavior. A framework is proposed that connects identication and control. In addition, a new data-driven uncertainty modeling procedure is used that results in a nonconservative model error bound. Application on an active vibration isolation system confirms high performance robust vibration isolation