Mode tuning of photonic crystal nanocavities by photoinduced non-thermal oxidation
- Intonti, F.
- Caselli, N.
- Vignolini, S.
- Riboli, F.
- Kumar, S.
- Rastelli, A.
- Schmidt, O.G.
- Francardi, M.
- Gerardino, A.
- Balet, L.P.
- Li, L.H.
- Fiore, A.
- Gurioli, M.
Publication date
January 2012
DOIAbstract
A method to achieve photoinduced tuning of PhC nanocavity modes is discussed and implemented. It is based on light induced oxidation in air atmosphere with very low thermal budget which produces a local reduction of the GaAs membrane effective thickness and a large blueshift of the nanocavity modes. It is also shown that green light is much more efficient in inducing the micro-oxidation with respect to near infrared light. The observed behaviour is attributed to oxide growth promoted by photoenhanced reactivity
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