A layout defect-sensitivity extractor

A method based on a deterministic geometrical construction of critical areas is presented for determining the sensitivity of layouts to spot defects. The models for fatal faults considered are bridges and cuts related to patterns in one layer. The approach, based on the concept of susceptible sites, has a complexity O(N log N), where N is the number of line segments. Only two scans are necessary to extract all susceptible sites, which then are used to compute the critical areas for a whole set of points in a domain of defect siz