A high degree of deactivation of glass and fused-silica capillary column walls is attainable by means of high temperature silylation (HTS) with or without a preceding leaching process. HTS with a phenyl containing disilazane, diphenyltetramethyldisilazane (DPTMDS), and polydimethylsiloxane (PDMS) are studied on Cab-O-Sil, a fumed silica, as a model substrate. Using 29Si CP-MAS NMR, it was shown that no dimethylsiloxane chains were formed upon silylation with DPTMDS under different conditions of humidity and stoichiometry at 377°C. With DPTMDS deactivation it is possible that amino trisiloxy silane groups are formed, these groups add extra activity to the surface. Silylation with a PDMS, OV 101, at various temperatures between 300°-420°C did...