A more efficient rigorous coupled-wave analysis algorithm

We present a modification of a well-known mathematical model based on the Rigorous Coupled-Wave Analysis (RCWA) that can be used to solve optical diffraction problems on periodic structures (both 1-D and 2-D gratings with approximated layer-structure). The algorithm calculates the reflected and transmitted field which in turn determine the diffraction efficiencies for all reflected and transmitted orders. Results created with a Matlab implementation of the modified RCWA algorithm (MSolver) show excellent overlap with other published and measured data