Method and arrangement ( 1 ) for generating an atmospheric pressure glow plasma APG ( 7 ), where in a plurality of electrodes, ( 4, 5 ) are arranged defining a discharge space ( 10 ) for forming said plasma ( 7 ). The electrodes ( 4,5 ) are connected to a power supply ( 8 ) providing an AC-voltage having a frequency of at least 50 kHz to the electrodes ( 4,5 ). A gaseous substance ( 6 ) is provided in said discharge space and comprises t least one of a group of argon, nitrogen and air
Method and arrangement for controlling a discharge plasma in a discharge space having at least two s...
Method and apparatus for deposition of a chemical compound or element using an atmospheric pressure ...
Apparatus (20) for producing and sustaining a glow discharge plasma in a plasma discharge space (11)...
Method and arrangement ( 1 ) for generating an atmospheric pressure glow plasma APG ( 7 ), where in ...
Method and arrangement for generating an atmospheric pressure glow (APG) plasma (1), wherein the pla...
Method and apparatus for generating and sustaining a glow discharge plasma in a plasma discharge spa...
The present invention is directed to a method and arrangement for controlling a glow discharge plasm...
The present invention provides an arrangement and method for generating a uniform and stable plasma....
Apparatus and method for atomic layer deposition on a surface of a substrate (6) in a treatment spac...
Method and arrangement for controlling a discharge plasma in a discharge space having at least two s...
Method and apparatus for deposition of a chemical compound or element using an atmospheric pressure ...
Apparatus (20) for producing and sustaining a glow discharge plasma in a plasma discharge space (11)...
Method and arrangement ( 1 ) for generating an atmospheric pressure glow plasma APG ( 7 ), where in ...
Method and arrangement for generating an atmospheric pressure glow (APG) plasma (1), wherein the pla...
Method and apparatus for generating and sustaining a glow discharge plasma in a plasma discharge spa...
The present invention is directed to a method and arrangement for controlling a glow discharge plasm...
The present invention provides an arrangement and method for generating a uniform and stable plasma....
Apparatus and method for atomic layer deposition on a surface of a substrate (6) in a treatment spac...
Method and arrangement for controlling a discharge plasma in a discharge space having at least two s...
Method and apparatus for deposition of a chemical compound or element using an atmospheric pressure ...
Apparatus (20) for producing and sustaining a glow discharge plasma in a plasma discharge space (11)...