Modelling sub-micron particle trajectories

High-tech manufacturing processes require very high accuracy and precision, whichmakes these processes extremely sensitive to contamination at ever-reducing sizescales. The use of complex mechatronic systems in manufacturing, such as dynamicrobots and moving stages, unavoidably results in the transport of particles.A numerical model will be developed and subsequently integrated into a classicalComputational Flow Dynamics tool, for more accurate prediction of sub-micronparticle trajectories in particle contamination transport. An experimental set-uphas been developed for model validation, including a visualisation tool for accuratemeasuring of particle dynamics