Add to ORKGApplication of the ion scattering spectroscopy techniques to studying materials for microelectronics are considered in detail. The main attention is paid to the low-energy ion scattering, and a comparison is given between this technique and the other methods used for studying solid surfaces. The possibilities to obtain quantitative analytical and structural information from the results of low-energy ion scattering measurements on the surface of various materials are analyzed.</p
This paper reviews the use of low energy ion beam systems for surface analytical and structural stud...
This diploma thesis deals with comparison of experimental and simulated low energy ion scattering sp...
We discuss the possibilities to apply low energy ion scattering (LEIS) for in situ surface analysis ...
Application of the ion scattering spectroscopy techniques to studying materials for microelectronics...
The possibilities of low-energy ion scattering spectroscopy for surface analysis are discussed. By c...
Ion scattering techniques have demonstrated capability to probe the composition and structure of the...
AbstractWe explore under which conditions low-energy ion scattering experiments are capable of obtai...
An apparatus for studying metal crystal surfaces with ion scattering techniques is described. These ...
The fundamentals of high energy ion scattering and recoil spectrometry (possibly combined with chann...
Low-energy (0.1-10 keV) ion scattering (LEIS) can be used to analyze the atomic composition of the o...
The energy distribution of low-energy ions (1-2 keV) scattered at some specific angle from a solid s...
This paper reviews the use of low energy ion beam systems for surface analytical and structural stud...
This diploma thesis deals with comparison of experimental and simulated low energy ion scattering sp...
We discuss the possibilities to apply low energy ion scattering (LEIS) for in situ surface analysis ...
Application of the ion scattering spectroscopy techniques to studying materials for microelectronics...
The possibilities of low-energy ion scattering spectroscopy for surface analysis are discussed. By c...
Ion scattering techniques have demonstrated capability to probe the composition and structure of the...
AbstractWe explore under which conditions low-energy ion scattering experiments are capable of obtai...
An apparatus for studying metal crystal surfaces with ion scattering techniques is described. These ...
The fundamentals of high energy ion scattering and recoil spectrometry (possibly combined with chann...
Low-energy (0.1-10 keV) ion scattering (LEIS) can be used to analyze the atomic composition of the o...
The energy distribution of low-energy ions (1-2 keV) scattered at some specific angle from a solid s...
This paper reviews the use of low energy ion beam systems for surface analytical and structural stud...
This diploma thesis deals with comparison of experimental and simulated low energy ion scattering sp...
We discuss the possibilities to apply low energy ion scattering (LEIS) for in situ surface analysis ...