BCB bonding of high topology 3 inch InP and BiCMOS wafers for integrated optical transceivers

  • Spiegelberg, Marc
  • van Engelen, Jorn
  • de Vries, Tjibbe
  • Williams, Kevin
  • van der Tol, Jos
Publication date
November 2018

Abstract

In this publication the challenges of bonding InP and BiCMOS wafers with high topology are described. A possible process is discussed. Planarization with thick BCB is motivated and the challenges of wafer alignment are explained

Extracted data

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