Elastic recoil detection analysis with high energy alpha beams

Detection of low Z recoils (C, N, O) from scattering of high energy alpha particles (10-15 MeV) is compared with conventional ERDA with heavy ion projectiles. Recoils and scattered a particles are separated using pulse shape discrimination or coincidence methods. Submonolayer sensitivity and depth resolution in the nm range is obtained. Depth/mass ambiguity may be avoided.