Process mining techniques relate observed behavior to modeled behavior, e.g., the automatic discovery of a Petri net based on an event log. Process mining is not limited to process discovery and also includes conformance checking. Conformance checking techniques are used for evaluating the quality of discovered process models and to diagnose deviations from some normative model (e.g., to check compliance). Existing conformance checking approaches typically focus on the control-flow, thus being unable to diagnose deviations concerning data. This paper proposes a technique to check the conformance of data-aware process models. We use so-called Petri nets with Data to model data variables, guards, and read/write actions. Data-aware conformance...