The time evolution of the smallest anions (C2H- and H2CC-), just after plasma ignition, is studied by means of microwave cavity resonance spectroscopy (MCRS) in concert with laser-induced photodetachment under varying gas pressure and temperature in an argon–acetylene radio-frequency (13.56 MHz) plasma. These anions act as an initiator for spontaneous dust particle formation in these plasmas. With an intense 355 nm Nd¿:¿YAG laser pulse directed through the discharge, electrons are detached only from these anions present in the laser path. This results in a sudden increase in the electron density in the plasma, which can accurately and with sub-microsecond time resolution be measured with MCRS. By adjusting the time after plasma ignition at ...
In extreme ultraviolet (EUV) lithography, ionic and particulate debris coming from the plasma source...
In this paper, a detailed investigation of the spatio-temporal dynamics of a pulsed microwave plasma...
We present a new approach to measure population densities of Ar I metastable and resonant excited st...
The time evolution of the smallest anions (C2H- and H2CC-), just after plasma ignition, is studied b...
The time evolution of the ethynyl anion (C2H-) density, just after plasma ignition, has been studied...
The temporal afterglow between two pulses of a repetitively pulsed radio-frequency driven low-pressu...
Under certain conditions, dust particles are created spontaneously in low pressure argon/acetylene r...
This paper reports on the further development and improvement of time-resolved laser-induced photode...
We studied the temporal evolution of the electron density in a low pressure pulsed plasma induced by...
The formation and charging of submicrometer dust particles in a low pressure argon/silane radio-freq...
International audienceDiode laser absorption at 772.38 nm is used to measure the time resolved densi...
In extreme ultraviolet (EUV) lithography, ionic and particulate debris coming from the plasma source...
In this paper, a detailed investigation of the spatio-temporal dynamics of a pulsed microwave plasma...
We present a new approach to measure population densities of Ar I metastable and resonant excited st...
The time evolution of the smallest anions (C2H- and H2CC-), just after plasma ignition, is studied b...
The time evolution of the ethynyl anion (C2H-) density, just after plasma ignition, has been studied...
The temporal afterglow between two pulses of a repetitively pulsed radio-frequency driven low-pressu...
Under certain conditions, dust particles are created spontaneously in low pressure argon/acetylene r...
This paper reports on the further development and improvement of time-resolved laser-induced photode...
We studied the temporal evolution of the electron density in a low pressure pulsed plasma induced by...
The formation and charging of submicrometer dust particles in a low pressure argon/silane radio-freq...
International audienceDiode laser absorption at 772.38 nm is used to measure the time resolved densi...
In extreme ultraviolet (EUV) lithography, ionic and particulate debris coming from the plasma source...
In this paper, a detailed investigation of the spatio-temporal dynamics of a pulsed microwave plasma...
We present a new approach to measure population densities of Ar I metastable and resonant excited st...