This thesis focuses on the manipulation and analysis of single dopant atoms in GaAs by scanning tunneling microscopy (STM) and spectroscopy (STS) at low temperatures. The observation of ionization rings is one of the key results, showing that we can control the charge state of a single dopant atom by the STM tip. Using the ionization rings, we can study properties of a single dopant atom, such as its binding energy. The binding energy is an important property with respect to device applications. A low binding energy is needed for the impurities to act as donors or acceptors, and to induce free carriers in the conduction or valence band, respectively. Defects with a large binding energy act as traps and reduce the carrier density. We found t...