Experimental validation of hardening and softening resonances in a clamped-clamped beam MEMS resonator

By means of a combined analytical-numerical and experimental approach, the nonlinear dynamic behavior of a clamped-clamped beam MEMS resonator has been investigated. A good quantitative correspondence between simulations and experiments has been obtained. First-principles based multiphysics modeling is applied to derive a reduced-order model of the resonator. The model includes nonlinear geometric and electrostatic effects as well as thermoelastic damping and anchor loss. Both simulations and experiments show hardening and softening nonlinear dynamic behavior depending on the excitation parameters. The model captures the observed nonlinear behavior and allows for design optimization with respect to nonlinear effects