Investigation of the gas flow effect on an atmospheric pressure RF plasma torch

A cool atmospheric pressure non-thermal capactively-coupled RF discharge is studied. It is created between two parallel electrodes – a powered one supplied by 13.56 MHz, and a grounded one. The feed gas argon flows via holes between the electrodes where it is ionized. The plasma torch is studied by means of a time dependent two-dimensional fluid model. A simplified kinetic scheme with four active species is considered, namely argon excited atoms (Ar*), atomic (Ar+) ions, molecular (Ar2+) ions and electrons (e). The plasma dynamics in the space between the electrodes as well as in the extended region behind the grounded electrode is studied. The effect of the gas flow on the plasma is examined. Constriction of the plasma is induced by the field sustaining the discharge due to the sieve-like structure of the electrodes. As a result of the stationary gas flow the filaments extend beyond the electrodes ensuring a flow of active species in the afterglow