Structural and thermoelectrical investigations of Europium Titanate thin films grown by pulsed laser deposition

The present work can be classified as fundamental research on thermoelectricity and the implementation of the oxide thermoelectric material EuTiO3 into silicon technology. In this work, a pulsed laser deposition chamber is presented and the effect of the laser radiation on different target materials was investigated. The perovskite material EuTiO3 was epitaxially grown on SrTiO3 and the growth was analyzed with atomic force microscopy, x-ray diffraction and transmission electron microscopy. Further, EuTiO3 was grown on yttria-stabilized zirconia, which was grown on a silicone substrate. The heteroepitaxial growth was also analyzed with atomic force microscopy, x-ray diffraction and transmission electron microscopy. Finally the thermoelectric properties of the EuTiO3 thin films were measured