A bimetallic thin film actuated micro liquid delivery system (LDS)

As advances in micromachining technology have been made in recent years, a variety of movable, free-standing novel structures and devices have been developed. In addition to research based on micromotors and other actuators, micro delivery systems for liquids and gases have also been targeted as one of the major applications of MicroElectroMechnical Systems (MEMS). The ability to deliver liquid drugs in small, precise doses in a localized tissue or organ area has generated many medical applications, such as insulin therapy, pain releasing and chemotherapy. Such micro liquid delivery systems can also be used in chemical, bio/DNA analyses and inkjet printing technology.Master of Engineering (MPE