Recent advancements in micro and nanofabrication initiated the increasing sophisticated of measurements and characterization at nanometer scale. Various kinds of measurement systems such as atomic force microscopy, scanning probe microscopy, electron microscopy are developed to characterize the materials and devices at ever increasing magnification. The optical measurements system has also advanced beyond simple optical microscopy. Techniques such as holography and digital holography were developed to characterize the micro and nano-scale devices. The ability to extract the three dimensional information from the hologram provides a great opportunity to develop a more advanced characterization tool for many micro and nano-scale optical metro...
Continued demands for delivery of high performance systems place unprecedented requirements on metho...
It is shown how 3-D metrology can be used for MEMS measurements. Part of a MEMS-3-D CMM can be a pro...
AbstractConventional optical microscopy suffers from small depth of focus due to its high numerical ...
Studies on digital holographic microscopy for full field high resolution 3-D profiling of MEMS and m...
The continuously advancing Micro-Electro-Mechanical Systems (MEMS) technology requires a robust non-...
An optical microscope, utilizing the principles of time-averaged hologram interferometry, is describ...
Digital holography became feasible since the availability of charged coupled devices (CCDs) with sma...
Development of a commercial prototype of reflection handheld digital holographic microscope system i...
We demonstrate the use of digital holographic microscopy (DHM) as a metrological tool in micro-optic...
Micro/mesoscience is an emerging area of science and engineering that focuses on the study of assemb...
The appearance of the first laser approximately 12 years after the invention of holography by Gabor ...
Digital holography is an emerging field of new paradigm in general imaging applications. By replacin...
A compact reflection digital holographic microscopy (DHM) system integrated with the light source an...
In-line digital holography helps to relax the spatial resolution requirement on charge-coupled devic...
Digital holographic Microscopy (DHM) is an imaging modality reconstructing the wavefront in a numeri...
Continued demands for delivery of high performance systems place unprecedented requirements on metho...
It is shown how 3-D metrology can be used for MEMS measurements. Part of a MEMS-3-D CMM can be a pro...
AbstractConventional optical microscopy suffers from small depth of focus due to its high numerical ...
Studies on digital holographic microscopy for full field high resolution 3-D profiling of MEMS and m...
The continuously advancing Micro-Electro-Mechanical Systems (MEMS) technology requires a robust non-...
An optical microscope, utilizing the principles of time-averaged hologram interferometry, is describ...
Digital holography became feasible since the availability of charged coupled devices (CCDs) with sma...
Development of a commercial prototype of reflection handheld digital holographic microscope system i...
We demonstrate the use of digital holographic microscopy (DHM) as a metrological tool in micro-optic...
Micro/mesoscience is an emerging area of science and engineering that focuses on the study of assemb...
The appearance of the first laser approximately 12 years after the invention of holography by Gabor ...
Digital holography is an emerging field of new paradigm in general imaging applications. By replacin...
A compact reflection digital holographic microscopy (DHM) system integrated with the light source an...
In-line digital holography helps to relax the spatial resolution requirement on charge-coupled devic...
Digital holographic Microscopy (DHM) is an imaging modality reconstructing the wavefront in a numeri...
Continued demands for delivery of high performance systems place unprecedented requirements on metho...
It is shown how 3-D metrology can be used for MEMS measurements. Part of a MEMS-3-D CMM can be a pro...
AbstractConventional optical microscopy suffers from small depth of focus due to its high numerical ...