Add to ORKGThe development of micro electromechanical systems (MEMS) has demanded various techniques in producing high precision micro mechanical components. Micro EDM plays an important role for its superiority in specific processes, and a complementary role with LIGA processes in creating sophisticated MEMS or micro molds for MEMS components. Studies on machining on silicon and stainless steel micro mechanical components are dominant.Master of Science (Mechanics & Processing of Materials
Micro-EDM is a process based on the thermoelectric energy between the workpiece and an electrode. M...
High precision micro tools are necessary for a variety of 3D micro machining processes [1,2,3]. Micr...
This project aims in revealing the optimum results for micromachining of silicon and copper using Mi...
The development of micro electromechanical systems (MEMS) has demanded various techniques in produci...
The rapid growth in demand for micro parts has urged today’s manufacturing industry to establish a r...
The ongoing advances in Microelectromechanical Systems (MEMS) are providing man-kind the freedom to ...
With rapid technology advancement, the need for micro product is rapidly increasing in microeletroni...
Micro-EDM is the excellent production technology for the manufacturing of precise features, in conve...
AbstractThis paper studies on micro fabrication methods for MEMS. Silicon micromachining has been a ...
With rapid technology development in the fields of biomedical devices, aerospace, automobile, energy...
The remarkable progress ofMEMS (Micro Electro Mechanical Systems) research has reached the stage w...
A novel die-sinking micro-electro discharge machining (EDM) process is presented for volume fabricat...
In recent years, advanced materials with distinctive metallurgic properties like super alloys, compo...
The various micromachining processes required for micro engineering and for the successful realisati...
Microelectromechanical systems (MEMS) are integratedmicrodevices or systems combining electrical and...
Micro-EDM is a process based on the thermoelectric energy between the workpiece and an electrode. M...
High precision micro tools are necessary for a variety of 3D micro machining processes [1,2,3]. Micr...
This project aims in revealing the optimum results for micromachining of silicon and copper using Mi...
The development of micro electromechanical systems (MEMS) has demanded various techniques in produci...
The rapid growth in demand for micro parts has urged today’s manufacturing industry to establish a r...
The ongoing advances in Microelectromechanical Systems (MEMS) are providing man-kind the freedom to ...
With rapid technology advancement, the need for micro product is rapidly increasing in microeletroni...
Micro-EDM is the excellent production technology for the manufacturing of precise features, in conve...
AbstractThis paper studies on micro fabrication methods for MEMS. Silicon micromachining has been a ...
With rapid technology development in the fields of biomedical devices, aerospace, automobile, energy...
The remarkable progress ofMEMS (Micro Electro Mechanical Systems) research has reached the stage w...
A novel die-sinking micro-electro discharge machining (EDM) process is presented for volume fabricat...
In recent years, advanced materials with distinctive metallurgic properties like super alloys, compo...
The various micromachining processes required for micro engineering and for the successful realisati...
Microelectromechanical systems (MEMS) are integratedmicrodevices or systems combining electrical and...
Micro-EDM is a process based on the thermoelectric energy between the workpiece and an electrode. M...
High precision micro tools are necessary for a variety of 3D micro machining processes [1,2,3]. Micr...
This project aims in revealing the optimum results for micromachining of silicon and copper using Mi...