Development of silicon-on-glass electrostatic microactuators with a high aspect ratio and vertical configuration

261 p.Actuators are the key components that produce the mechanical output and perform physical functions of particular systems. Electrostatic actuators are widely used in micro electromechanical systems (MEMS) applications for their combining versatility and simple technology. In this thesis, an electrostatic microactuator fabricated on silicon-on-glass (SOG) is studied.DOCTOR OF PHILOSOPHY (MAE