Introduction to VLSI technology and design

Today, silicon technologies clearly dominate the area of very-large-scale integration (VLSI). Especially the CMOS technology has prevailed as it combines high packing density with low power dissipation further, the CMOS technology can accomodate other device like JFETs or bipolar transistors when additional technological steps are included. Thus the CMOS has the potential of becoming a universal technology of the future. In particular, the bipolar-CMOS mixed technology offers advantages unrivalled in other technologies combining high driving bipolar capability with the advantages of CMOS