Add to ORKGMicroactuators for electromechanical signal conversion will be described. Basic elements of the transducer is a bimorph structure combined with an integrated heat source. Due to the differences of the coefficients of thermal expansion, a temperature controlled deformation of the bimorph structures occurs. Bulk and surface micromachining techniques can be used to achieve an object displacement perpendicular to or within the substrate plane respectively. The main advantages of this class of actuators are simple fabrication processes and operation at standard IC-voltage levels allowing further system integration. The conversion characteristics will be described and the application of these transducers for microvalves, optical components, manip...
Transduction mechanisms and their applications in micromechanical actuators and resonating sensors a...
A compact polysilicon surface-micromachined microactuator designed for optical switching application...
An overview of the major sensor and actuator projects using the micromachining capabilities of the M...
A new type of micromachined silicon actuator has been developed, based on the so-called bimetallic e...
A bimorph thermal actuator (BTA) is typically used to actuate other MEMS structures, such as, micro-...
Signal conversion from the electrical to the mechanical range in silicon devices is generally compli...
System integration is often by the incompatibility of technology used for the fabrication of signal ...
Several authors have given overviews of microelectromechanical systems, including microactuators. In...
We have fabricated thermal actuators based on vertical bimorphs, which consist of silicon beams side...
We report on the development of a thermally isolated bimorph structure based on a Ni|Si pair. A 1-mm...
Micromachined thermal multimorph actuators for out-of-plane displacements have been designed and fab...
Several authors [1,2] have given overviews of microelectromechanical systems, including microactuato...
The thermal bimorph actuator is a multi-layer Micro-Electro-Mechanical (MEMS) device used to achieve...
[[abstract]]In this study, an electrothermal microactuator for bi-directional motion is designed and...
In this thesis, a novel concept for lateral actuators based on vertical bimorphs is presented. Verti...
Transduction mechanisms and their applications in micromechanical actuators and resonating sensors a...
A compact polysilicon surface-micromachined microactuator designed for optical switching application...
An overview of the major sensor and actuator projects using the micromachining capabilities of the M...
A new type of micromachined silicon actuator has been developed, based on the so-called bimetallic e...
A bimorph thermal actuator (BTA) is typically used to actuate other MEMS structures, such as, micro-...
Signal conversion from the electrical to the mechanical range in silicon devices is generally compli...
System integration is often by the incompatibility of technology used for the fabrication of signal ...
Several authors have given overviews of microelectromechanical systems, including microactuators. In...
We have fabricated thermal actuators based on vertical bimorphs, which consist of silicon beams side...
We report on the development of a thermally isolated bimorph structure based on a Ni|Si pair. A 1-mm...
Micromachined thermal multimorph actuators for out-of-plane displacements have been designed and fab...
Several authors [1,2] have given overviews of microelectromechanical systems, including microactuato...
The thermal bimorph actuator is a multi-layer Micro-Electro-Mechanical (MEMS) device used to achieve...
[[abstract]]In this study, an electrothermal microactuator for bi-directional motion is designed and...
In this thesis, a novel concept for lateral actuators based on vertical bimorphs is presented. Verti...
Transduction mechanisms and their applications in micromechanical actuators and resonating sensors a...
A compact polysilicon surface-micromachined microactuator designed for optical switching application...
An overview of the major sensor and actuator projects using the micromachining capabilities of the M...