Add to ORKGSince the publication of the first one-dimensional process simulation programs, increasing activities have been carried out in the development and improvement of the physical models involved and the development of more general programs which may be used for simulations in two or three dimensions. In this paper, some aspects of recent work carried out at FhG-AIS are discussed
The use of simulation aids in the automation of industrial processes is not a new idea. Simulation f...
With shrinking dimensions and growing complexity of advanced ULSI devices three-dimensional effects ...
The development of simulation technology and their benchmark efforts are intensively promoted at man...
Since the publication of the first one-dimensional process simulation programs, increasing activitie...
In VLSI development process simulation is needed to understand the interaction between successive pr...
In contrast to the early times of simulation where the tools were dedicated either to the simulation...
Process simulation has shown to be an important tool for the development in the fields of ULSI and p...
A new two-dimensional multilayer process simulator based on finite element method has been developed...
The increasing complexity of the demands in device- and particularly process simulation calls for si...
Abstract- Up-to-date process and device simulation requires sophisticated physical models and a secu...
Simulation of diffusion processes during front-end silicon process steps needs to address a variety ...
During the last few years, process simulation has become a valuable tool for the optimization of sem...
Numerical simulation of processes has shown to be an important tool for development in the fields of...
The chemical and biotechnological process industry is confronted with a time and capital consuming i...
The thesis deals with computer simulation of processes, which is crucial in the field of process eng...
The use of simulation aids in the automation of industrial processes is not a new idea. Simulation f...
With shrinking dimensions and growing complexity of advanced ULSI devices three-dimensional effects ...
The development of simulation technology and their benchmark efforts are intensively promoted at man...
Since the publication of the first one-dimensional process simulation programs, increasing activitie...
In VLSI development process simulation is needed to understand the interaction between successive pr...
In contrast to the early times of simulation where the tools were dedicated either to the simulation...
Process simulation has shown to be an important tool for the development in the fields of ULSI and p...
A new two-dimensional multilayer process simulator based on finite element method has been developed...
The increasing complexity of the demands in device- and particularly process simulation calls for si...
Abstract- Up-to-date process and device simulation requires sophisticated physical models and a secu...
Simulation of diffusion processes during front-end silicon process steps needs to address a variety ...
During the last few years, process simulation has become a valuable tool for the optimization of sem...
Numerical simulation of processes has shown to be an important tool for development in the fields of...
The chemical and biotechnological process industry is confronted with a time and capital consuming i...
The thesis deals with computer simulation of processes, which is crucial in the field of process eng...
The use of simulation aids in the automation of industrial processes is not a new idea. Simulation f...
With shrinking dimensions and growing complexity of advanced ULSI devices three-dimensional effects ...
The development of simulation technology and their benchmark efforts are intensively promoted at man...