Hybrid micro-LED devices enabled by elastomeric micro-transfer printing

The work presented in this thesis focuses on the development of hybrid micron-sized light emitting diode (micro-LED) devices by elastomeric micro-transfer printing. The main body of this work is divided into the development of dual-colour micro-LED devices and the integration of micro-LEDs with control electronics, mainly for optical communication and optogenetics applications.;Individually addressable III-nitride based blue-green and blue-violet micro-LED arrays and in-series connected blue-green micro-LED arrays were fabricated by microtransfer printing a blue micro-LED platelet onto to the substrate a pre-fabricated green (or violet) micro-LED. Gigabit per second (Gbps) error-free data rates in free-space visible light communication (VLC) and up to 200 Mbps in highly turbid underwater media have been demonstrated using these dual-colour arrays. Gbps VLC based on III-phosphide red micro-LEDs micro-transfer printed onto diamond and glass substrates is also presented.;Furthermore, the integration of III-phosphide red micro-LEDs onto a III-nitride based optrode for dual-colour excitation of different neural populations is also demonstrated. III-nitride based singulated micro-LEDs were directly integrated onto a silicon complementary metal oxide semiconductor (CMOS) drive chip containing a monolithic single photon avalanche diode detector, by elastomeric micro-transfer printing. An 8x8 array was realised with excellent uniformity both in brightness and modulation performance across the full array, which has led to a 128 kbps optical camera communication link, and to a time-of-flight ranging demonstration with cm-scale resolution.The work presented in this thesis focuses on the development of hybrid micron-sized light emitting diode (micro-LED) devices by elastomeric micro-transfer printing. The main body of this work is divided into the development of dual-colour micro-LED devices and the integration of micro-LEDs with control electronics, mainly for optical communication and optogenetics applications.;Individually addressable III-nitride based blue-green and blue-violet micro-LED arrays and in-series connected blue-green micro-LED arrays were fabricated by microtransfer printing a blue micro-LED platelet onto to the substrate a pre-fabricated green (or violet) micro-LED. Gigabit per second (Gbps) error-free data rates in free-space visible light communication (VLC) and up to 200 Mbps in highly turbid underwater media have been demonstrated using these dual-colour arrays. Gbps VLC based on III-phosphide red micro-LEDs micro-transfer printed onto diamond and glass substrates is also presented.;Furthermore, the integration of III-phosphide red micro-LEDs onto a III-nitride based optrode for dual-colour excitation of different neural populations is also demonstrated. III-nitride based singulated micro-LEDs were directly integrated onto a silicon complementary metal oxide semiconductor (CMOS) drive chip containing a monolithic single photon avalanche diode detector, by elastomeric micro-transfer printing. An 8x8 array was realised with excellent uniformity both in brightness and modulation performance across the full array, which has led to a 128 kbps optical camera communication link, and to a time-of-flight ranging demonstration with cm-scale resolution