Add to ORKGThe fabrication of capacitive pressure sensors using silicon integrated circuit processing is described. The pressure sensors were fabricated using planar etch processing techniques. This results in very small sensors having membrane diameters between 50 micrometers and 150 micrometers. The pressure dependence was studied up to 5 bars. Concepts for on chip signal conditioning by using the switch-capacitor method are given
The aim of this research project was to develop capacitive and piezoresistive silicon pressure senso...
An ultraminiature capacitive solid-state pressure sensor has been developed which can be mounted in ...
This paper introduces a noval family of monolithic integrated surface micromachined pressure sensors...
The fabrication of capacitive pressure sensors using silicon integrated circuit processing is descri...
In this paper a single chip pressure and temperature sensor system with on chip electronics is prese...
A capacitive pressure sensor with CMOS switched-capacitor circuitry for on-chip signal conditioning ...
A capacitive micropressure sensor with readout circuits on a single chip is fabricated using commerc...
Abstract In this paper, we presents a MEMS pressure sensor integrated with a readout ...
The study investigates a capacitive micro pressure sensor integrated with a ring oscillator circuit ...
A capacitive pressure sensor with CMOS switched-capacitor circuitry for on-chip signal conditioning ...
In the early phase of MEMS development piezoresistive pressure transducers were dominating due to th...
The design and fabrication of a capacitive pressure sensor comprising two microengineered silicon wa...
This paper introduces a novel family of monolithic integrated surface micromachined pressure sensors...
This paper presents a pressure sensor based on a variable capacitor formed by a movable polysilicon ...
This paper introduces a noval familiy of monolithic integrated surface micromachined pressure sensor...
The aim of this research project was to develop capacitive and piezoresistive silicon pressure senso...
An ultraminiature capacitive solid-state pressure sensor has been developed which can be mounted in ...
This paper introduces a noval family of monolithic integrated surface micromachined pressure sensors...
The fabrication of capacitive pressure sensors using silicon integrated circuit processing is descri...
In this paper a single chip pressure and temperature sensor system with on chip electronics is prese...
A capacitive pressure sensor with CMOS switched-capacitor circuitry for on-chip signal conditioning ...
A capacitive micropressure sensor with readout circuits on a single chip is fabricated using commerc...
Abstract In this paper, we presents a MEMS pressure sensor integrated with a readout ...
The study investigates a capacitive micro pressure sensor integrated with a ring oscillator circuit ...
A capacitive pressure sensor with CMOS switched-capacitor circuitry for on-chip signal conditioning ...
In the early phase of MEMS development piezoresistive pressure transducers were dominating due to th...
The design and fabrication of a capacitive pressure sensor comprising two microengineered silicon wa...
This paper introduces a novel family of monolithic integrated surface micromachined pressure sensors...
This paper presents a pressure sensor based on a variable capacitor formed by a movable polysilicon ...
This paper introduces a noval familiy of monolithic integrated surface micromachined pressure sensor...
The aim of this research project was to develop capacitive and piezoresistive silicon pressure senso...
An ultraminiature capacitive solid-state pressure sensor has been developed which can be mounted in ...
This paper introduces a noval family of monolithic integrated surface micromachined pressure sensors...