The proposal describes a pressure sensor which has a diaphragm held by a support, said diaphragm comprising a diaphragm reinforcement area mainly arranged in the middle, the thickness measurement of which is greater than the thickness measurement of the diaphragm, and an electrical converting device which converts a mechanical deformation of the diaphragm into a change in electrical parameter. The pressure sensor is characterized by the fact that the diaphragm has two further diaphragm reinforcement areas each having a larger thickness measurement than that of the diaphragm, said diaphragm reinforcement areas being spaced from the edge of the diaphragm and arranged in such a way that the first central diaphragm reinforcement area is situate...
A MEMS-based silicon pressure sensor for the ocean environment is presented. The invention is a mult...
A MEMS-based silicon pressure sensor for the ocean environment is presented. The invention is a mult...
A new principle for pressure measurements is presented. It bases on the shifting of the resonance fr...
A pressure sensor has a first and a second sensor body. The first sensor body has a first recess on ...
A fibre-optic pressure sensor for measuring the movement of a pressure diaphragm (25) has a transmis...
A pressure sensor arrangement comprising a pressure sensor, a reference element and measurement circ...
This invention relates to an integratable, capacitive pressure sensor arrangement which comprises a ...
A pressure sensor has a multiplicity of piezoelectric converter elements which are arranged such tha...
DE 102009036568 A1 UPAB: 20110315 NOVELTY - The sensor (1) has an electrode structure for excitation...
A pressure measuring arrangement has a pressure sensor structure comprising a pressure-dependent mea...
The system has a passage opening (12) formed in the first main surface of the substrate (10), with a...
PhDElectrical engineeringUniversity of Michigan, Horace H. Rackham School of Graduate Studieshttp://...
Ph.D.Electrical engineeringUniversity of Michigan, Horace H. Rackham School of Graduate Studieshttp:...
The sensor has at least two piezoelectric pressure sensors (2) spaced apart from each other and arra...
This paper emphasizes the optimization of piezoresistive pressure sensor. The proposed design is to ...
A MEMS-based silicon pressure sensor for the ocean environment is presented. The invention is a mult...
A MEMS-based silicon pressure sensor for the ocean environment is presented. The invention is a mult...
A new principle for pressure measurements is presented. It bases on the shifting of the resonance fr...
A pressure sensor has a first and a second sensor body. The first sensor body has a first recess on ...
A fibre-optic pressure sensor for measuring the movement of a pressure diaphragm (25) has a transmis...
A pressure sensor arrangement comprising a pressure sensor, a reference element and measurement circ...
This invention relates to an integratable, capacitive pressure sensor arrangement which comprises a ...
A pressure sensor has a multiplicity of piezoelectric converter elements which are arranged such tha...
DE 102009036568 A1 UPAB: 20110315 NOVELTY - The sensor (1) has an electrode structure for excitation...
A pressure measuring arrangement has a pressure sensor structure comprising a pressure-dependent mea...
The system has a passage opening (12) formed in the first main surface of the substrate (10), with a...
PhDElectrical engineeringUniversity of Michigan, Horace H. Rackham School of Graduate Studieshttp://...
Ph.D.Electrical engineeringUniversity of Michigan, Horace H. Rackham School of Graduate Studieshttp:...
The sensor has at least two piezoelectric pressure sensors (2) spaced apart from each other and arra...
This paper emphasizes the optimization of piezoresistive pressure sensor. The proposed design is to ...
A MEMS-based silicon pressure sensor for the ocean environment is presented. The invention is a mult...
A MEMS-based silicon pressure sensor for the ocean environment is presented. The invention is a mult...
A new principle for pressure measurements is presented. It bases on the shifting of the resonance fr...