Add to ORKGThe fabrication process for a potentiometric silicon sensor will be described. The sensor was fabricated in bulk silicon micromachining using a double side wafer process. A small channel was etched anisotropically in (100) silicon. The back side groove was metallised. To form an ion-selective electrode an ion-selective membrane was deposited in the channel. Additionally, a novel type of Ag/AgCl/Ag reference electrode was integrated on the front side of the chip. The small size of the sensor allows the application in catheter systems
The development of smart Si sensors which combine active circuitry and sensor on the same chip, has ...
In critical care the blood potassium concentration is an important parameter to characterise the pat...
Potentiometric ion‐sensitive planar microelectrode arrays, and amperornetric enzyme‐containing biose...
The fabrication process for a potentiometric silicon sensor is described. The sensor was fabricated ...
The performance of miniaturized potentiometric cells, with multilayer, planar ion-selective sensors ...
The interest in miniaturization of modern chemical and medical sensors is steadily increasing. Howev...
This work reports the design and fabrication of an amperometric three-electrode silicon sensor packa...
Sensor miniaturization can be reached by the integration of potentiometric sensors with silicon tech...
The paper highlights some of the significant works done in the field of medical and biomedical sensi...
and Nicolaas F. de Rooij’ For an example of a silicon-based micromachined ana-lyzer, we describe a c...
We have designed and realised a new type of microsystem for the electrical characterisation of array...
The membrane deposition technology on silicon-based transducers constitutes the most delicate part o...
[[abstract]]This paper proposed a new direction for the miniaturization of silicon bulk-machined sen...
[[abstract]]This paper proposed a new direction for the miniaturization of silicon bulk-machined sen...
The development of smart Si sensors which combine active circuitry and sensor on the same chip, has ...
In critical care the blood potassium concentration is an important parameter to characterise the pat...
Potentiometric ion‐sensitive planar microelectrode arrays, and amperornetric enzyme‐containing biose...
The fabrication process for a potentiometric silicon sensor is described. The sensor was fabricated ...
The performance of miniaturized potentiometric cells, with multilayer, planar ion-selective sensors ...
The interest in miniaturization of modern chemical and medical sensors is steadily increasing. Howev...
This work reports the design and fabrication of an amperometric three-electrode silicon sensor packa...
Sensor miniaturization can be reached by the integration of potentiometric sensors with silicon tech...
The paper highlights some of the significant works done in the field of medical and biomedical sensi...
and Nicolaas F. de Rooij’ For an example of a silicon-based micromachined ana-lyzer, we describe a c...
We have designed and realised a new type of microsystem for the electrical characterisation of array...
The membrane deposition technology on silicon-based transducers constitutes the most delicate part o...
[[abstract]]This paper proposed a new direction for the miniaturization of silicon bulk-machined sen...
[[abstract]]This paper proposed a new direction for the miniaturization of silicon bulk-machined sen...
The development of smart Si sensors which combine active circuitry and sensor on the same chip, has ...
In critical care the blood potassium concentration is an important parameter to characterise the pat...
Potentiometric ion‐sensitive planar microelectrode arrays, and amperornetric enzyme‐containing biose...