Verfahren und Vorrichtung zur Justierung der Strahlfuehrung und -formung sowie zur Vermessung von Optiken, insbesondere in Laserstrahlanlagen

The invention relates to a process and a device for adjusting beam guidance and shaping and for aligning optical systems, in particular in laser systems. In the processor according to the invention, ray bundles or quasi ray bundles composed of parallel rays are generated by means of a ray-emitting diode array or by splitting the beam of a light source in order to assess the course of the beam. The beam is split by plane-parallel plates or retro-reflectors, i.e., without additional lenses, and thus without distorting the course of the beam. The parallel rays traverse the optical components of the optical system and finally impinge on an optical screen or a position-sensitive radiation unit. A measure for the quality of the optical system or its adjustment is determined from the deviation of the emitted rays by preset nominal values. If necessary, the optical system can be re-adjusted manually or by means of an analysis and control unit. A preferred process consists of the fact that temp orary individual or several parallel rays in the ray bundle are masked. Compared with adjustment using a processing laser or expanded alignment lasers, the process according to the invention is much less complex and also has higher alignment precision. The advantage of the invention is that the device on which it is based ..