The invention relates to the fields of micromechanics and microelectronics and refers to a micromechanical element. The invention is based on the technical problem of specifying a micromechanical element which can be used as a hybrid and can alter precisely the adjustment range independent of its dimension tolerances without the need for special complex measures. The problem is solved by a micromechanical element in which a piezoelectric and/or a ferroelectric component are/is affixed to the underside of a silicon tongue and are/is controllable by an electric field, whereby the underside of the silicon tongue is the opposite side of the side of the silicon tongue bearing the functional element
The invention relates to an apparatus and a method for controlling or regulating the deflection of m...
DE 102007047010 A1 UPAB: 20090509 NOVELTY - The micromechanical component (100) has a substrate, whi...
A micromechanical relay production process involves: (a) applying a sacrificial layer (26) onto a su...
DE 102008049647 A1 UPAB: 20100428 NOVELTY - The micromechanical element (100) has a mobile functiona...
The invention relates to a dielectric micromechnical element, the movable part of which (hereinafter...
A micromechanical element includes a plate-shaped micromechanical functional element, an inner frame...
The description refers to a micromechanical component comprising a substrate and a flat deformable e...
US 20080278785 A1 UPAB: 20081128 NOVELTY - The micromechanical device (1100) has slots (120,122) tha...
The invention relates to deflectable micromechanical systems in which the deflection of at least one...
In one embodiment, a hybrid micromechanical resonator includes a capacitive resonator element and a ...
The invention relates to a micromechanical switch (1) having a substrate (100) on which at least one...
The description relates to a micromechanical manipulator comprising a substrate 1, heating elements ...
The invention relates to a piezo-electrical adjustment device, in particular for moving and/or posit...
Micro-electromechanical system (MEMS) comprising a substrate or substrate parts, and a compliant fir...
A new type of micromachined silicon actuator has been developed, based on the so-called bimetallic e...
The invention relates to an apparatus and a method for controlling or regulating the deflection of m...
DE 102007047010 A1 UPAB: 20090509 NOVELTY - The micromechanical component (100) has a substrate, whi...
A micromechanical relay production process involves: (a) applying a sacrificial layer (26) onto a su...
DE 102008049647 A1 UPAB: 20100428 NOVELTY - The micromechanical element (100) has a mobile functiona...
The invention relates to a dielectric micromechnical element, the movable part of which (hereinafter...
A micromechanical element includes a plate-shaped micromechanical functional element, an inner frame...
The description refers to a micromechanical component comprising a substrate and a flat deformable e...
US 20080278785 A1 UPAB: 20081128 NOVELTY - The micromechanical device (1100) has slots (120,122) tha...
The invention relates to deflectable micromechanical systems in which the deflection of at least one...
In one embodiment, a hybrid micromechanical resonator includes a capacitive resonator element and a ...
The invention relates to a micromechanical switch (1) having a substrate (100) on which at least one...
The description relates to a micromechanical manipulator comprising a substrate 1, heating elements ...
The invention relates to a piezo-electrical adjustment device, in particular for moving and/or posit...
Micro-electromechanical system (MEMS) comprising a substrate or substrate parts, and a compliant fir...
A new type of micromachined silicon actuator has been developed, based on the so-called bimetallic e...
The invention relates to an apparatus and a method for controlling or regulating the deflection of m...
DE 102007047010 A1 UPAB: 20090509 NOVELTY - The micromechanical component (100) has a substrate, whi...
A micromechanical relay production process involves: (a) applying a sacrificial layer (26) onto a su...