New Cleanroom and Cleanliness Concepts for Microsystem Production

The cleanroom production technology offers different ways from Ballroom concept to minienvironment and clean machines. There is an increasing trend to regard this technology from the point of the product. For microsystem products this will be shown exemplarily by a new cleanliness and production concept. This concept has to integrate available techniques to fulfil the special requirements for growing industry. To demonstrate the feasibility of this approach, the design concept of a microfabrication process centre which includes tasks like transport and handling, processing, cleaning, testing and storing has been developed and investigated. On the one hand, special attention has been paid to highly modular clean production concepts within the microfabrication process centre, on the other hand to contamination-free transport to and for external service providers and to contamination-avoidance during microassembly and handling. Crucial point for the successful application of the MicroFab concept is the implementation of homogeneous mechanical, environmental and information interfaces within the microproduction process centre as well as external providers of technology