Productronica 97. Proceedings HLF. Semiconductor equipment and materials contamination control and defect reduction

The subject of the Productronica Workshop ¯Semiconductor Equipment and Materials® in Munich 1997 was contamination control and defect reduction. They are one of the key issues of semiconductor manufacturing with larger wafer diameter and smaller structures. The contribution of the speakers dealed with cleaning, particle detection, contamination, defects, yield, measuring systems and materials like wafer and chemicals etc